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Equipment&Parts List
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Manufacturer

Category

Recommendations

tel-unity-me-85qd-oxide

[SG79168]
TEL Unity Me 85QD Oxide

Etch
disco-dfd6361-wafer-sawing

[SG87985]
Disco DFD6361 Wafer Sawing

Packaging
tel-tactras-vigus1-oxide

[SG78780]
TEL Tactras Vigus-1 Oxide

Etch
tel-lithius-i-cotdev

[SG95485]
TEL LITHIUS i+ COT/DEV

Track
screen-ws820l-batch-cleaning

[SG41680]
SCREEN WS-820L Batch Cleaning

WET
hitachi-s5500-fesem

[SG62830]
Hitachi S-5500 FE-SEM

Metrology
olympus-mx61lf-microscope

[SG80855]
Olympus MX61L-F Microscope

Others
amat-centura-40-radiance-rtp

[SG80741]
AMAT Centura 4.0 Radiance RTP

RTP
screen-su3100-single-cleaning

[SG49042]
SCREEN SU-3100 Single Cleaning

WET
tel-lithius-proi-cotdev

[R150793]
TEL LITHIUS Pro-i COT/DEV

Track
tel-alpha303ik-mto

[SG37562]
TEL Alpha-303i-K MTO

Furnace
screen-ss3100-scrubber

[R52993]
SCREEN SS-3100 Scrubber

Track
mattson-paradigme-etch

[SG41909]
Mattson ParadigmE Etch

Etch
nikon-nsrs204b-krf-scanner

[SG62251]
Nikon NSR-S204B KrF Scanner

Scanner
tel-ns300-scrubber

[SG87997]
TEL NS300 Scrubber

Track
rudolph-3di8500-macro-inspection

[SG28409]
Rudolph 3Di8500 Macro inspection

Metrology
ebara-frex300s2-w

[SG59406]
EBARA F-REX300S2 W

CMP
mattson-aspen-2-asher

[SG73718]
Mattson Aspen 2 Asher

Asher
tel-p12xl-prober

[SG71770]
TEL P-12XL Prober

ATE
asm-ad830-die-bonder

[SG66811]
ASM AD830 DIE BONDER

Packaging

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